Laser Signal Injection Microscopy
LSIM works by scanning a laser beam through a microscope lens, over an integrated circuit while monitoring the circuit input and output for laser induced changes. By choosing the laser wavelength, different effects can be produced. Short wavelength lasers produce electron & hole pairs, (photo-carriers) in the semiconductor. These photo-generated carriers reveal failure sites in transistors and PN junctions. Longer wavelength lasers induce heating and that reveals resistive and ohmic problems. Both photo-carrier generation and microthermal heating may be performed from the front or backside of the wafer, so the LSIM is a powerful backside inspection tool.
The
LSIM is available on a dedicated optical head as pictured (at right)
or on the QFI’s Multi Sensor
Platform as seen (at left)
The Multi Sensor Platform combines the LSIM with Emission Microscopy and IR thermal hot spot detection.
If you require further information please click on the "More Information" link at the top of the page and one of our team will provide any details you may require.
Or contact us directly:
Firfax Systems Ltd
Meteor Business Park,
Gloucestershire Airport,
Cheltenham Road East,
Gloucester,
GL2 9QL, UK.
T. +44 (0) 1452 717 800
E. sales@firfaxsystems.co.uk