For manual scribing and cutting of structured silicon wafers
MR 200 - the ideal tool for REM preparations in semiconductor technology
The
structure and equipment of the MR200 make highly accurate cutting and breaking
of structured silicon wafers possible. The MR200 is an indispensable
tool, in particular for REM preparations within the semiconductor technology,
but also for small numbers of items in laboratories.
After positioning the substrate or piece of wafer (minimum size 20mmx20mm) on the wafer chuck, the microscope is focused on the wafer surface. By manually driving the table and adjusting in the y-direction (cutting line), the y-line of the cross hair matches the x-position and the angle position with reference marks or structures.
The high quality 4x zoom microscope makes it possible to step between the overview and detailed representation on the test specimen?s surface. With the fine adjustment of the x/y table, the wafer is very accurately positioned. The cutting strength can be adapted to the material to be cut, as the pressure of the cutting diamond is adjusted by a valve. During the cutting procedure, the fall or rise of the cutting diamond is controlled by means of foot switches, so that the manual cutting movement can be steered with both hands. The setup point of the cutting diamond can be adjusted. The eyepiece cross hair should thereby indicate the set up point of the cutting diamonds.
The chuck can be turned accurately around 90° with the vacuum switched on so that precise running cutting lines can be produced perpendicular to each other. If the cutting line is fixed, the cutting diamond is lowered pneumatically by using the foot switch. For cutting, the complete vacuum chuck is moved by hand. The cutting procedure can be observed using the microscope. The cutting strength can be adjusted to a wide range according to the materials to be scribed. A video system for the microscope so that wafer positioning can be seen on a monitor is available as an option.
If you require further information please click on the "More Information" link at the top of the page and one of our team will provide any details you may require.
Or contact us directly:
Firfax Systems Ltd
Meteor Business Park,
Gloucestershire Airport,
Cheltenham Road East,
Gloucester,
GL2 9QL, UK.
T. +44 (0) 1452 717 800
E. sales@firfaxsystems.co.uk