The Micromanipulator Company invented analytical probing. The development of leading edge analytical probe stations and accessories for semiconductor probing professionals has been The Micromanipulator Company's primary focus since 1956.
The Firfax Systems sales and engineering team provide the critical local link to this world player by providing all the critical local support functions. This includes competent technical support throughout the specification and sales process, installation and training, and trouble shooting capabilities to our customers throughout the UK and beyond.
The product line includes:
9000 Series 300mm (12 inch) Probe Stations - The 9000 series test stations offer 300mm wafer probing available in manual or semi-automatic versions.
- Model 9920 Semi-Automatic wafer prober incorporates Micromanipulator’s industry leading prober technology. It features a multi-function joystick as well as an integrated keypad for common prober functions with a 40 character LCD.
- Model 9020 Manual prober has all the physical features of the 9920 and it uses drive by wire control of the stage and microscope to provide dynamic resolution range and ergonomic control. The manual 9020 is upgradeable to the Semi-Automatic 9920.
8000 Series 200mm & 150 mm (8 & 6 inch) Probe Stations – The
8000 series offer solutions for 200mm and 150mm wafers available
in manual or semi-automatic versions.
- Model 8860 Semi-Automatic -Powerful analytical capabilities combined with user-friendly, navigation control pcProbe II software are the decisive elements of Micromanipulator's Model 8860 test stations.
- Model 8060 Manual Probe Station - features the basic foundation of the 8860 Semi-Automatic prober without joystick (motorised) or computer (programmable) control. Comfortable MicroTouch knobs permit both fast movement across the wafer and fine control for accurate positioning all in a stable, intuitive and space efficient system.
4000 Tech Series provides quality, cost effective 150 mm (6 inch) or 200 mm (8 inch) probe stations. The Tech Series provide the ease of use, stability and precision that you expect from a Micromanipulator probe station. However, the cost is reduced by removing some of the extra convenience and higher performance features found in the premier 8000 Series.
Other applications for the Tech Series include LCD probing, Probe Card probing, Reliability Testing, Thin Film probing, and Process Monitoring on test pads like for CV or electromigration tests
- Models 4060 – Manual control probe stations for 150 mm (6-inch) or 200 mm (8-inch) wafers. Ideally suited for general probing and laser cutter use.
- Model 4460 - Semi-automatic pendant controlled test station provide quality 150 mm (6-inch) or 200 mm (8-inch) probe stations at a cost effective price.
6000 Series
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6000 100mm Manual Probe Station– Most widely used 100mm (4”) manual station.
The Model 6000 probe station is the most widely used 100mm (4”) probing station by any manufacturer. It was first introduced in 1970 for LSI probing and has been refined over the years to provide support for both demanding high precision analytical probing as well as general probing tasks. The traditional Micromanipulator open design makes setup flexible and easy for the user. The Model 6000 probe station is a cost effective alternative for those who do not need to probe large wafers. - 6200 100 - 150mm Manual Probe Station– The Model 6200 probe station is the most popular 150mm (6”) probing station model. It is designed to provide support for both demanding high precision analytical probing as well as general probing tasks. This station is designed for the ease of use, stability and precision that you expect from a Micromanipulator probe station.
- 6000 Series Accessories and Options
The 6000 series stations (models 6000 and 6200) have a wide range of accessories and options. Below are some of the most commonly used.
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Probe Master Series Model 350PM - a powerful, economical probe station
with outstanding flexibility. Interchangeable stage assemblies are
available to facilitate probing 4", 5" and 6" wafers,
hybrid substrates up to 4"x4", packaged delidded devices
and wafers at elevated temperatures
Desktop Prober Model S8 - The Model S8 is a low cost, 200 mm (8
inch) analytical test station with a very compact footprint and is
well suited for probing applications where lab space may be limited.
Speciality Stations – A wide range of speciality stations are available. For further information on any of the stations listed below or other speciality requirements, contact the Firfax Sales and Engineering team today.
Low Noise
Low Current Probing Products
VAC Prober for MEMs applications
Double-sided/backside prober
C-V stations
In-Circuit Probing
Test Head Probing
Large Area Probing
High Voltage
Electromigration
If you require further information please click on the "More Information" link at the top of the page and one of our team will provide any details you may require.
Or contact us directly:
Firfax Systems Ltd
Meteor Business Park,
Gloucestershire Airport,
Cheltenham Road East,
Gloucester,
GL2 9QL, UK.
T. +44 (0) 1452 717 800
E. sales@firfaxsystems.co.uk